ASML's new-generation EUV lithography machine costs nearly 2.7 billion yuan

　　According to Reuters, semiconductor equipment giant ASML is developing a new flagship lithography machine worth US$400 million. It is expected to complete the prototype in the first half of 2023, put it into use as early as 2025, and ship it from 2026 to 2030.

　　According to the news, the new-generation High-NA EUV lithography machine is about the size of a double-decker bus and weighs more than 200 tons. The device has higher precision and uses more parts, and can be used to produce next-generation chips. The chip terminal field can cover mobile phones, laptops, automobiles, AI, etc.

　　The industry speculates that this new machine should refer to the High-NA EXE: 5200 (0.55NA). In mid-January this year, Intel announced that it was the first to place an order for the ASML TWINSCAN EXE: 5200 lithography machine. Combined with this year's ASML Q1 In the quarterly financial report, more than one EXE: 52000 has been ordered.

　　It is understood that ASML's next-generation EUV 0.55NA platform is expected to reduce chip size by 1.7 times, further improve resolution, and increase microchip density by nearly 3 times.

　　It is reported that the 0.55NA lithography machine is 30% larger than the current 0.33NA EUV lithography machine, and the price is about twice that of the 0.33NA EUV. At present, in order to overcome the technical challenges, ASML is establishing a test laboratory together with IMEC, the world's largest microelectronics R&D institution.

　　At present, foundries such as Intel, Samsung, and TSMC are expanding their production significantly. Among them, TSMC and Samsung are constantly upgrading their advanced processes. It is reported that this year they have announced that they will mass-produce 3nm this year. The industry speculates about the equipment they use It should be the latest generation of ASML's 0.33NA EUV. The lithography machine equipment matches the chip manufacturing process. At present, the EUV lithography machine can temporarily meet the needs of mass production of 3nm, but the process below 3nm is difficult to do. This is one of the reasons why ASML is accelerating the development of new lithography machines.

　　According to recent foreign media news, companies such as TSMC plan to start producing the 2nm generation in 2023. If the news is true, ASML's high-end lithography machine will be even hotter.

　　ASML will be busy for the next few years. At the Q1 earnings conference, ASML stated that as the market demand for chip manufacturing equipment exceeds the supply in the second quarter, it will raise its long-term revenue forecast, maintaining a 20% revenue growth this year and the production capacity of 55 EUV technology. , and said that in 2025, it will be able to produce more than 70 extreme ultraviolet lithography machines.

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